MASS and VOLUMETRIC Gas Flow meters

Gas flow meters of the M and V series use two of the best-studied physical properties of gases to measure flow: Viscosity and Pressure. Differential pressure measurement, across a laminar flow element, results in a flowmeter that is inherently linear. The flowmeters measure differential pressure within the laminar region, to achieve a typical turndown ratio of 100:1. Units are available with a very wide range of measurement, starting at 500 micro-liters per minute full scale to 1500 liters per minute full scale.

The "NON-THERMAL" M series Mass Gas Flowmeters use discrete Absolute Pressure, Differential Pressure, and Temperature sensor measurements within the laminar flow region to determine mass flow. The embedded microprocessor provides a software-based STP calculation compensated for pressure and temperature to standard conditions (1 atmosphere 25º Celsius). The M series address the limitations of thermal mass flow technologies, as there is no "Hot Wire" drift. The unit has an adjustable response time starting from 10 milliseconds. The dynamic display units show mass flow, volumetric flow, temperature and absolute pressure simultaneously. With the push button interface, the user can select the primary display, gas of interest (14 standard gases featured), adjust meter response time or tare the meter at zero flow. The optional battery pack makes for a powerful portable test and calibration tool.

Volumetric Gas Flowmeters of the V series are designed for applications venting to atmosphere, with constant and minimal/no backpressure. They do not include absolute pressure or discrete temperature sensors, which makes them an affordable alternative to mass flowmeters. As with the M series, the Volumetric flowmeters use discrete Differential Pressure sensor measurements within the laminar flow region to determine flow.

Specification M Meter V Meter Units Sample FS Ranges
Accuracy ±1% ±1% Full Scale 0.5 (S)CCM
Repeatability ±0.5% ±0.5% Full Scale 1 (S)CCM
Turndown Ratio 100:1 100:1   2 (S)CCM
Response Time 10 10 Milliseconds 5 (S)CCM
Full Scale Press. Drop Consult DigiFlow     10 (S)CCM
Temperature Range
(Operating)
-10 to +50 -10 to +50 °C 20 (S)CCM
Zero Shift 0.02% / ATM 0.02% FS/°C/atm 50 (S)CCM
Span Shift 0.02% / ATM 0.02% FS/°C/atm 100 (S)CCM
Humidity Range 0-100% non-condensing 0-100% non-condensing   200 (S)CCM
Excess Flow Rate 20X 20X Full Scale 500 (S)CCM
Common-Mode Pressure 125 15 PSIG 1 (S)LPM
Supply Voltage 7 - 30 7 - 30 Vdc 2 (S)LPM
Supply Current 35 30 mA 5 (S)LPM
Voltage Output - Std 0-5 or 0-10 0-5 or 0-10 Vdc 10 (S)LPM
Media Air, Argon, Nitrogen, Oxygen, Hydrogen, Helium, Carbon Dioxide, Methane, Propane, Carbon Monoxide, Ethane, Nitrous Oxide, Neon, etc. 20 (S)LPM
Connections 10-32 for 50 SCCM & under
1/8" for 50+ SCCM - 20SLPM,
1/4" for 50 & 100 LPM,
1/2" for 250 SLPM
3/4" for 500 to 1000 SLPM
  UNF
NPTF
50 (S)LPM
Wetted Materials Anodized AL, 303 & 302 Stainless Steel, Viton®, Silicone RTV, Glass reinforced Nylon 100 (S)LPM
250 (S)LPM
500 (S)LPM
1000 (S)LPM
1500 (S)LPM
Flow Range Height Length Depth Port Size
0.5SCCM - 50SCCM 3.867" 2.375" 1.05" 10-32 UNP
100 SCCM - 20 SLPM 4.167" 2.375 1.05" 1/8" FNPT
50 SLPM - 100 SLPM 4.367" 4.000" 1.600" 1/4" FNPT
250 SLPM 4.967" 4.000" 1.600" 1/2" FNPT
500 - 1000 SLPM 4.967" 4.000" 1.600" 3/4" FNPT
*Very low flow devices may have special ports to reduce dead volume.

Back to Products

Home | Products | Contact Us | Related Links
©2000 DigiFlow Systems. All rights reserved.